MEAglow (Hollow Cathode Plasma Source)
The Next Generation Plasma Source
Upgrade your Plasma Source today!!!
Meaglow has developed a range of wider
area plasma source like 12″ diameter plasma sources for ALD and PECVD applications.
These sources have been used to replace existing plasma sources, but also for new systems.
l300 to 3000 Watt RF or DC operation.
l316 Stainless steel cathode construction
(titanium and inconel have also been used, other materials on request).
lWide range of gas usage.
lLow oxygen contamination (no dielectric windows).
lHigh electron density – one of our 4″ systems had a vale of >1013 cm-3 for nitrogen at 300 watts.
lWide range of operating pressures (eg. from <50 mTorr to >5 Torr).
However, the pressure can be engineered outside of this range for specific pplications.
lLow plasma damage.
lCustomized solutions available.